These are Skywalker Sound sound effects of sparks chirping, clicking, hissing, etc. Most of these sounds / sound effect clusters/combos were probably designed by Gary Rydstrom.

One of the spark chirps, SKYWALKER, ELECTRICITY - SINGLE SPARK CHIRP 02 (see first audio sample), debuted in Star Wars: Episode V - The Empire Strikes Back (1980); possibly created by Ben Burtt.

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